METHOD OF MEASURING ROUGHNESS OBJECTS OF HIGH CLASS OF PURITY 

Kostrikina Inna Anatol'evna, candidate of technical sciences, chief metrologist, Research Institute of Electron-Mechanical Instruments (44 Karakozova street, Penza, Russia), E-mail: gmetr@niiemp.ru
Makarkin Leonid Alekseevich, master degree student, Penza State University (40 Krasnaya street, Penza, Russia), E-mail: leonmakarkin@gmail.com 

620.179.118.2 

10.21685/2307-5538-2019-1-7 

Background. The object of the research is high-purity sieveall substrates. The subject of the research is the methods of measuring roughness parameters with small Rz values. The aim of the work is to develop a method for measuring the surface roughness of high grade purity by applying a profile measure.
Materials and methods. To describe the process of measuring the roughness used a Gaussian model. The contact method of roughness measurement is considered.
Results. An approach to the implementation of measuring the roughness of surfaces of high purity, based on the use of a reference roughness measure, allows to increase the sensitivity of the contact roughness measurement method with a profilometer.
Conclusions. The method of measuring the surface roughness of high purity, allows to increase the sensitivity of standard profilometers. The proposed method for measuring roughness through the use of a standard profile measure of roughness makes it possible to measure on surfaces of high grade purity using standard profilometers of the middle class of accuracy. 

object of research, sitall substrates, surface roughness measurement